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Ultra-low outgassing vacuum component - Measurable as low as 10-12Pa(~10-14Torr)
- Reduction of soft X-ray & ESD by Bent Belt-Beam method.
- Full-closed cylindrical cage-grid with an axial-slit.
- Low outgassing hot-cathode gauge by using 0.2%BeCu alloy body.
Document Information
Document Title | XHV gauge head:3B-Gauge |
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Document Type | Product Catalog |
File size | 368.1Kb |
Company | 東京電子株式会社 (Documents List) |