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Research-grade, high performace thermal evaporation for metals and organics
High-performance metals, organic evaporation in compact packages for benchtop location. Superior, efficient performance and ideal for OLED, OPV and OFET research.
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Document Information
Document Title | nanoPVD-T15A |
---|---|
Document Type | Product Catalog |
File size | 240.6Kb |
Category | |
Company | Thermocera Japan Ltd. (Documents List) |
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Document Contents
Page1
nanoPVD-T15A by Moorfield.
Research-grade thermal evaporation for metals
and organics.
Model T15A
Moorfield Nanotechnology Limited. Unit 1, Wolfe Close, Parkgate Industrial Estate, Knutsford, Cheshire, UK, WA16 8XJ.
Registered in England and Wales with company number 3044718.
PRODUCT INFORMATION e: sales@moorfield.co.uk t: +44 (0)1565 722609 w: moorfield.co.uk
Page2
F
A High vacuum chamber
B Chamber viewport
C Touchscreen HMI
D Frame housing electronics
and power supplies
A C E
G
B
D H
I
E Hardware connections H Electrical connections & fuses
F Rotation assembly I Water/gas/data connections
G Turbomolecular pump
Organics and metals evaporation in a benchtop package: Ideal solution for
OLED, OPV and OFET research.
Moorfield have recently introduced the nanoPVD series of benchtop deposition systems. Compact and suitable for easy
location — but not to be confused with microscopy-related products — nanoPVD systems are derived from proven R&D thin-
film system technology and have been developed through extensive collaboration with leading academic groups. The tools
are optimised for ease of use, represent outstanding value for money and are ideal where available space and budgets are
key considerations — without compromising on quality of results.
• Benchtop configuration
• Base pressures < 5 × 10-7 mbar
• Up to 4 LTE sources for organics
• Up to 2 evaporation sources for metals
• High aspect-ratio chamber for uniform coating
• 4” diameter stages
• Sample heating option
• Source and substrate shutters
• Fully automatic operation via touchscreen HMI
• Define/save multiple process recipes
• Equipped for easy servicing
• Comprehensive safety features
• Cleanroom compatible
• Proven performance
LEFT: Model of magnetron sputtering
source as fitted to nanoPVD-S10A.
CENTRE: Chamber baseplate
showing metals and organics
sources.
RIGHT: Evaporation source types that
can be fitted to the nanoPVD-T15A.
Visit moorfield.co.uk or call +44(0) 1565 722609
Moorfield Nanotechnology Limited. Unit 1, Wolfe Close, Parkgate Industrial Estate, Knutsford, Cheshire, UK, WA16 8XJ.
Registered in England and Wales with company number 3044718.
PRODUCT INFORMATION e: sales@moorfield.co.uk t: +44 (0)1565 722609 w: moorfield.co.uk