低圧- 3000シリーズより広い圧力レンジをカバー
低圧用
圧力レンジ: 1~300 psi / 75~2100 kPa
チップ種別: 絶対圧、ゲージ圧、差圧、負圧
チップサイズ: 1,95x1.95 mm
動作温度: -40~150℃
オフセット: ±10 (mV/V) @無負荷, 25℃
非線形性: ±0.2 (%FSO) @25℃
圧力ヒステリシス: ±0.1 (%FSO) @25℃
温度ヒステリシス: ±0.2 (%FSO) @無負荷, -40~150℃
温度特性: ゼロポイント ±25 (μV/V/℃)) @-40~150℃
抵抗値 2500(min)~3500(max) (ppm/℃)) @-40~150℃
感度 -1500(min)~-2500(max) (ppm/℃)) @-40~150℃
温度ヒステリシス: ±0.2 (%FSO) @無負荷
長期安定性: ±0.2 (%FSO)
検出対象: 清浄/乾燥空気、非腐食性ガス
仕様オプション ブリッジ抵抗 5kΩ / 3.5kΩ
ブリッジタイプ Open / Half Bridge / Closed
出荷オプション: 伸縮テープ / ワッフルパック
このカタログについて
ドキュメント名 | センサチップ Jシリーズ |
---|---|
ドキュメント種別 | 製品カタログ |
ファイルサイズ | 356.6Kb |
登録カテゴリ | |
取り扱い企業 | ファインセンシング株式会社 (この企業の取り扱いカタログ一覧) |
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このカタログ(センサチップ Jシリーズ)の内容
Page 1:DATA SHEETJ SeriesJseriesDS.003Sales 1 801.208.4722 · Customer Service 1 801.208.4700 · Fax 1 801.208.4798 · sensors@merit.com · www.MeritSensor.com1600 W. Merit Parkway · South Jordan, Utah · 84095 · USAFEATURESRange 1 to 300 psi (0.07 to 21 bar; 7 to 2100 KPa)Type Absolute, gage, differential and vacuumMedia Clean, dry air and non-corrosive gasesShipping Wafers on tape, waffle packFlexibility Sensitivity, resistance, bridge, constraint, etc.BENEFITSPerformance Enjoy best-in-class performance due to Merit’s proprietary Sentium technologyCost Save money over time with high-performing dieSecurity Feel confident doing business with an experienced company backed by a solid parent company (NASDAQ: MMSI)Speed Get to market quickly with creative and flexible solutionsService Experience prompt, personal, and professional supportThe J Series is ideal for high-volume, low-pressure applications.COMPANY: Merit Sensor is a leader in piezoresistivepressure sensing and partners with clients to create highperforming solutions for a variety of applications and industries.SENTIUM: Merit Sensor products incorporate a proprietarySentium®technology, developed to provide a best-in-classoperating temperature range (-40°C to 150°C) and superior stability.TECHNOLOGY: Merit Sensor utilizes a piezoresistiveWheatstone bridge in a design that anodically bonds glassto a chemically etched silicon diaphragm. All productsare RoHS compliant.CAPABILITIES: Merit Sensor designs, engineers,fabricates, dices, assembles, and tests products froma state-of-the-art facility near Salt Lake City, Utah.J Series Part Number ConfiguratorConstraintV = 1.5 mm AbsoluteW = 1.5 mm GageJXPX-XXXX-XTImpedance1 = 5kohm BridgeBridgeH = ½ OpenC = ClosedExample:J1PC-3200-WToffers 5kohm impedance,Closed Bridge, 5 psi, and1.5mm Gage ConstraintPRELIMINARYμV/V/psi5333 = 1psi or 3psi*3200 = 5psi1067 = 15psi533 = 30psi320 = 50psi160 = 100psi105 = 150psi53 = 300psi01020304050607080901001101201300 0.25 0.5 0.75 1 1.25 1.5 1.75 2 2.25 2.5 2.75 3 3.25Pressure (psig)Output(milliVolts)Typical Transfer Function (Sensor pn J1PH-5333-WT):Vout = (40 * P) Offset ± ErrorThis graph assumes offset = 0mV , Vs = 7.5V, and TEMP = 25°C*Example: When using theJ1PH-5333-WT,the typical output at 1psi = 40mV
Page 2:V INV-IN V-IN OUT VV -OUT13425 OUVV INV-IN V-IN OUT VV -OUT13425V INV-IN OUT VV -OUT1342J SeriesSales 1 801.208.4722 · Customer Service 1 801.208.4700 · Fax 1 801.208.4798 · sensors@merit.com · www.MeritSensor.com1600 W. Merit Parkway · South Jordan, Utah · 84095 · USASPECIFICATIONSParameter Minimum Typical Maximum Units NotesElectrical & EnvironmentalExcitation 1.5 mA Maximum: 3 mAImpedance 4000 5000 6000 ΩOperating Temperature -40 150 °C Sentium®technologyStorage Temperature -55 160 °CPerformanceOffset -10 0 10 mV/V Zero pressure; gage only; @25°CNon-linearity -0.2 0 0.2 % FSO Best Fit Straight Line; @25°C; Tested withTop-side PressurePressure Hysteresis -0.1 0 0.1 % FSO @25°CTemp Coeff – Zero -25 0 25 μV/V/°C -40°C to 150°CTemp Coeff – Resistance 2500 3000 3500 PPM/°C -40°C to 150°CTemp Coeff – Sensitivity -1500 -2000 -2500 PPM/°C -40°C to 150°CThermal Hysteresis -0.2 0 0.2 % FSO Zero pressure -40°C to 150°CLong-Term Stability -0.2 0 0.2 % FSO Zero pressureBurst Pressure 5X Full scale pressureFull-Scale Output (@ 1.5 mA excitation)3 psi (0.21 bar; 21 kPa) 95 120 145 mV Typical output at 1 psi = 40 mV5 psi (0.34 bar; 34 kPa) 95 120 145 mVOther outputs availableupon request15 psi (1 bar; 103 kPa) 95 120 145 mV30 psi (2 bar; 207 kPa) 95 120 145 mV50 psi (3.5 bar; 345 kPa) 95 120 145 mV100 psi (7 bar; 670 kPa) 95 120 145 mV150 psi (10 bar; 1035 kPa) 95 120 145 mV300 psi (21 bar; 2070 kPa) 95 120 145 mVDIMENSIONS (millimeters, post-cut)Half Closed BridgeHalf Closed BridgeClosed BridgeClosed BridgeELECTRICALPRELIMINARYBond Pad (1-4) Size = 0.15mm x 0.15mmBond Pad (5) Size = 0.30mm x 0.15mm0.80mm 0.80mm0.84mm0.84mm0.84mm0.35mm1.95mm1.95mm1.95mm0.29mm 0.29mm0.38mm0.22mm4531 24mmm Bond Pad (1-4) Size = 0.15mm x 0.15mmBond Pad (5) Size = 0.30mm x 0.15mm0.80mm 0.80mm0.84mm0.84mm0.84mm0.35mm1.95mm1.95mm1.95mm1.95mm0.29mm 0.29mm0.38mm0.22mm4531 224310.80mm0.80mm0.80mm0.80mm0.84mm0.29mmBond Pad Size = 0.15mm x 0.15mm0.6 1.51.9Standard Bond PadMetallization = AluminumAbsolute also; other constraints availableNote: Bridge output bond pads (V-out and V out) correspond to top sidepressure. For back side pressure, the bridge outputs are reversed.