UL3000 Fab - save time and space

V i s i o n a r y h e l i u m l e a k d e t e c t i o n t e c h n o l o g y UL3000 Fab F a s t , p r e c i s e a n d m o b i l e h e l i u m l e a k d e t e c t o r f o r t h e s e m i c o n d u c t o r i n d u s t r y UL3000 Fab - save time and space The INFICON helium leak detector UL3000 Fab is designed SLIM DESIGN FOR ADVANCED MANEUVERABILITY for the needs of leak testing in semiconductor applications. A low center of gravity, big wheels, ergonomically designed handle and the slim housing enable good mobility of the It features flexibility, mobility, fast start up, high sensitivity, fast UL3000 Fab even in tight spaces. and precise test results, and reliability. FAST RESULTS The improved vacuum system with low maintenance vacuum UL3000 FAB ADVANTAGES AT A GLANCE pumps allows the detection of leaks starting from atmospheric pressure. • Ready to measure at atmospheric pressure Rugged mass spectrometer system ensures long running • Perfect mobility due to small turning radius time and low maintenance costs. • Easy operation due to intuitive innovated menu The HYDRO-S software in the UL3000 Fab PLUS eliminates • Operable by smartphone via webbrowser the water vapour background and makes leak testing even • Low maintenance requirement faster. • Robust vacuum system, insensitive to dirt and The UL3000 Fab PLUS offers also an improved sniffer which contamination has capability by using the well proven sniffer line SL3000 up • Accessories available right at the device to 10 m length. ROTATABLE AND REMOTE CONTROLLABLE DISPLAY The new touch screen display shows test results and status information even from a long distance. Easy operation via user guided menu structure, even for unskilled operators. A wireless control of the UL3000 Fab is possible via smart- phone or tablet - without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis. Full turnable and remote controllable display

SPECIFICATIONS Min detectable leak rate for helium (vacuum method) < 5 x 10-12 mbar l/s Min detectable leak rate for helium (sniffer mode) < 5 x 10-8 mbar l/s Max inlet pressure MASSIVE mode: 1000 mbar Pumping speed during evacuation > 32 m³/h Helium pumping speed (high sensitive mode) 4 l/s Response time < 1 s Time until ready for operation < 3 min Detectable masses 2, 3, 4 (H2, 3He, He) Ion source 2 filaments, Iridium/Yttria oxide coated Test port DN 25KF Adjustable triggers 4 Interface 2 x USB, Ethernet / LAN Supply voltage 100 - 240 V 50/60 Hz Power consumption typ. 700 VA, max. 1500 VA Dimensions (L x W x H) 1050 x 472 x 987 mm Weight 120 kg Permissable ambient temperature range (during operation) 10 to 40 °C ORDERING INFORMATION PRODUCT CAT. NO. ULTRATEST UL3000 Fab 550-200 ULTRATEST UL3000 Fab PLUS (HYDRO-S, Sniffer line SL3000 port) 550-250 ACCESSORIES RC1000 remote control, wired, incl. 4m coiled cable 551-010 RC1000WL remote control, wireless, incl. Wireless transmitter 551-015 Sniffer line SL200, 4m length 140 05 Sniffer line SL3000 with integrated display (only for UL3000 Fab PLUS), – 3m length 525-001 – 5m length 525-002 – 10m length 525-003 I/O1000 module (input / output module) 560-310 BM1000 Profibus module 560-315 BM1000 PROFINET I/O module 560-316 BM1000 Device Net module 560-317 BM1000 Ethernet/IP 560-318 Data cable (I/O1000 to UL3000 Fab / UL3000 Fab PLUS) – 0.5 m 560-334 – 5 m 560-335 – 10 m 560-340 Test Chamber TC1000 551-005 Helium bottle holder 551-201 www.inficon.com reachus@inficon.com Due to our continuing program of product improvements, specifications are subject to change without notice. iica73en1-01-(1704) ©2017 INFICON