Solutions for the Semiconductor Industry

Page 1:Solutions for the Semiconductor IndustryCompact, reliable, high-performance and precise

Page 2:2Comprehensive sensor expertise from a single source.Solutions tailored to needAs a leading sensor specialist and system provider with a companytradition of over 90 years, Balluff GmbH has been a recognized part-ner in factory automation for decades. With 56 sales offices and nineproduction sites, Balluff has a strong presence on every continent.The corporate headquarters in Neuhausen a.d.F. is located nearStuttgart.Balluff masters the entire technological variety with various operatingprinciples, including high-quality sensors and systems for positionmeasurement and identification, as well as sensors for detectingobjects and measuring fluids. The full-range assortment includesoptimal network and connection technology and a comprehensiveline of accessory products.We offer innovative, first-class products tested in our own accreditedlaboratory, and maintain certified quality management in accordancewith DIN EN 9001:2008. Our technology speaks for itself in inter-national applications since it also meets regional standards.Balluff stands for application-specific customer solutions, com-prehensive services, individual consultation and prompt service.Our staff of more than 2,600 employees is committed to providingoutstanding service worldwide.

Page 3:3www.balluff.comSemiconductors are the centerpiece of mobile communication.Smartphones, tablets and cloud computing have alreadyfundamentally changed the ways we communicate. Virtualnetworking continues to move forward amid this framework.This means more is demanded of semiconductor technology, aswell as from system manufacturers involved in the semiconductorfabrication.Semiconductor manufacturing operations have to be reliableandstable in order to ensure high-quality product manufacturing –even as requirements increase.Safeguarding highly complex, technologically demanding processeshas become more important than ever before.Balluff contributes to ensuring that systems for semiconductormanufacturing are efficient at every step and provide high availa-bility thanks to customer-specific solutions and extremely reliablecomponents.Sensors and Systemsfor Manufacturing Facilities inthe Semiconductor IndustryBalluff solves customer-specific requirementsBalluff Offers Customer-Specific 4Fill Level and Leak Detection 6Capacitive sensors safeguard processes in the semiconductorindustryWorking with Wafers – Handling Step-by-Step 8Reliable position detection betweensensitive process stepsCompact Sensors for SemiconductorManufacturing 10Miniature design; Maximum performanceTraceability Using RFID and Vision Sensors 12Unique detection and assignment of wafers and carriersProduct Selection 14Customized Products 16Take advantage of the optimumServices 18Customized. According to your specifications. The best in quality

Page 4:4Semiconductor manufacturing equipment places high requirementson precision and miniaturization. Particularly small designs areneeded in order to utilize expensive clean room space efficiently.This requires reliable, customized sensors.As a full-range sensor specialist, Balluff offers decades ofdevelopment and application experience with comprehensive exper-tise throughout the entire product lifecycle. This expertise ensurestimely product development to your specifications and individualrequirements.The right solutions – also for new and special productdevelopments■■ Extending the housing■■ Modular system design■■ Integrated housing■■ Technologies in individual housing designsBalluff Offers Customer-SpecificProduct Solutions4Object DetectionLinear Position Sensing and MeasurementStatus Monitoring and Fluid SensorsIndustrial IdentificationIndustrial Networking and ConnectivityAccessoriesSystems and Service

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Page 6:6Balluff BCS Capacitive sensors are used for level detection.They measure all materials – even non-conductive ones suchas liquids, granules and powders – in direct contact or throughcontainer walls.For the first time, our SmartLevel technology even makes it possibleto detect concentrated acids and bases through plastic containerswith walls up to 10 mm thick. SmartLevel sensors compensate formoisture, foam and deposits of all kinds as they work. Their simpleinstallation and integration, even in existing systems, also reducecosts.Contact-free detection of levels throughcontainer walls■■ Acids, bases and ultrapure water■■ Walls up to 10 mm thick■■ No bypasses required■■ Reduction in installation and material costs■■ Foam and deposit compensation usingSmartLevel technologyExample productBCS D50TT05-..., 50 mm disk design, PTFE materialContact-free detection of levels at bypass pipes:■■ Acids, bases and ultrapure water■■ Reduction in installation costs due to quick installation(using cable ties)■■ Foam and deposit compensation using SmartLeveltechnology■■ IO-Link variant on requestSample productsBCS R08RR01-..., block design (MicroBox), PP materialBCS Q40BBAA-..., block design (MicroBox), PBT materialFill Level andLeak DetectionCapacitive sensors safeguard processesin the semiconductor industry

Page 7:7www.balluff.comDetecting highly conductiveprocess fluids■■ Fill level measurement in contact withthe media■■ Non-flush mounting■■ PTFE material■■ Foam and deposit compensation usingSmartLevel technologyExample productBCS M30TTH2-..., M30 cylinder designNon-flush, PTFE materialLeak monitoring ofoverflow chambers■■ Simple bracket installation■■ Fully encapsulated PTFE housing■■ PTFE connection cable■■ Detects the smallest leak amountsExample productBCS M18TTI2-..., M18 cylinder design, non-flush, PTFE materialContinuous detection of thefill level■■ Highly accurate level measurement in theµm range (absolute)■■ Ability to measure separating layers■■ Stainless steel micropulse transducer (PFAcoating on request)■■ Pressure-resistantExample productBTL7-...-K, rod design, PTFE material

Page 8:8Balluff sensors ensure smooth wafer transport by robots in variousprocess steps, such as lithography, dry etching and cleaning. Integ-rated into the robot arm, they provide the solution for an assortmentof requirements, such as situations with limited space.Reliable wafer detection is guaranteed.Perfect integration due to 2.5 mm component height■■ Capacitive sensor■■ 2 m ribbon cable■■ Sensing surface made of PTFE■■ Simple long-distance adjustment thanks to separate amplifierExample productBCS D18T403-..., stainless steel housing, disk design,PTFE sensing surface, BAE SA-CS-001-PS amplifierHigh-precision, linear position detection■■ Quick and precise (resolution down to 1 µm) measurement system■■ System accuracy of up to /–7 µm■■ Non-contact, wear-free operating principle■■ Ideal for distances up to 48 mExample productSensor head: BML-S1H..., in an aluminum housingTape: BML-M02-A33-A3-..., magnetic tape of rubber-ferrite/stainless steelWorking with Wafers –Handling Step-by-StepReliable position detection betweensensitive process steps

Page 9:9www.balluff.comInductive end position detection of the robot carriage■■ Non-contact, wear-free operating principle■■ Extremely compact 8x16 mm design, 4.7 mm component height■■ Highly flexible 3-wire connection cableExample productBES R04KC-..., block design, PA 6 housing material,PA 6/GF 30 sensing surfacePrecise angle measurement in the robot arm joints■■ Flexible installation: Variable sensor head attachment■■ 1 µm resolution (digital)■■ Compact design■■ Movement speeds up to 20 m/sec.■■ Option of customized ring diametersExample productSensor head: BML-S1F_-Q..., in a stainless steel housingMagnet ring: BML-M31-I30-A0-...

Page 10:10Position sensing using inductive low-voltage sensors(NAMUR)■■ Minimum self-heating thanks to low current consumption■■ Ideal for continuous use■■ Reliably detects cable breaks and short-circuits■■ D4, D6.5, M5, M8 and 5x5 sizes availablePlease contact us if you have customizationrequirements.Reliably checking wafer thickness■■ Precise, contact-free wafer thickness measurementthanks to capacitive sensors■■ PTFE sensing surface■■ 6 mm rated switching distance■■ Integrated electronicsExample productBCS D30T401-..., disk design, stainless steel housing, PTFE sensingsurfaceCompact Sensorsfor SemiconductorManufacturingMiniature design;Maximum performanceMiniaturization in the semiconductor industry is set to continue.For the areas of wafer and carrier handling, Balluff offers miniaturesensors that meet this requirement perfectly.For instance, various technologies are available in a miniature design:Inductive, capacitive and fiber-optic sensors for object detection anddistance measurement. Inductive NAMUR sensors are recommen-ded for low-voltage applications.

Page 11:11www.balluff.comPhotoelectric diffuse sensor for carrierpresence check■■ Long range (up to 3 m)■■ Extensive range of variants (e.g. housing dimensions of M8 or 8x8)■■ Easy to operate■■ Precise in processExample productBOS08M..., cylinder design, housing made of nickel-plated brass,PMMA optical surfaceReliable wafer presence check withfiber optics – even at high temperatures■■ Metal corrugated tubing jacket for operating temperaturesup to 250 °C (fixed installation)■■ Crush-resistant■■ Flexible■■ Ideal for the tightest installation conditionsExample productFiber BFO 18A..., usable with BOS 18M..., cylinder design

Page 12:12Producing microchips is an extremely complex process.Due to alarge assortment of variants and high volume consisting of severalbillion chips per year, this process needs to flow smoothly, withcomplete transparency, so that there is an overview of the processat all times.Traceability solutions with RFID technology ensure that eachstep in a process chain can be detected and tracked.Time, place and processing are recorded continuously anddocumented in real time. Checks and corrections can even takeplace in the ongoing process.RFID – for reliable traceabilityA variety of features are needed when data needs to be recordedreliably for production and access control or as part of containermanagement. This is why Balluff offers read/write heads in variousdesigns that enable a broad range of applications – for solving a largeassortment of different tasks. Read/write heads are available for anyread and write distance.■■ Fast data transmission■■ With long ranges■■ 13.56 MHz HF (BIS M)■■ 125 kHz LF (BIS L)Example productRead/write head BIS M-301-.., PBT housing material, ASAUnique assignment using 4-byte identification number(unique ID)Thanks to a one-of-a-kind, read-only number, data carriers have uniqueIDs. Glass data carriers are resistant to chemicals. The attachmenthousing can be designed specific to the task.■■ Data carriers for harsh ambient conditions■■ Data carriers in various formats: Disk, cylinder, block or credit card-sized.Example productBIS M-152-... special design, data carrier with 112 bytes of memory,glass housing materialTraceability Using RFIDand Vision SensorsUnique detection and assignment ofwafers and carriers

Page 13:13www.balluff.comReliably identifying and assigning carriers and PCBsBarcodes are among the tools used for marking carriers and boards.Vision sensors BVS-E Ident are absolutely ideal for their uniqueidentification. Regardless of whether the codes are stickers, imprin-ted, laser-cut or directly marked, the BVS Ident reads, checks andverifies most common barcodes and data matrix codes with top-level reliability. Cost-effective processing of the code contents andthe quality of the code is possible thanks to integrated interfacessuch as RS232 and Ethernet TCP/IP.■■ Simple operation■■ Read, test and verify several codes at the same timein one check■■ Fast and reliable readingExample productVision sensor BVS ID-3-...

Page 14:14Product SelectionSuitable sensors for every application.At www.balluff.com you can find detailed technical information afterentering the product family or sample product.Application ProductfamilySpecialpropertiesHosingmaterialExample productWet etching table, process technologyFill leveldetection forplastic tanksCapacitivesensorsBCSContact-free scanning of acids, basesand ultrapure waterSmartLevel technology: Foam and de-posit compensation, flexible attachment(adhesives, screws, cable ties)PTFE or PBT BCS D50TT05-...Fill level detec-tion in contactwith the mediain tanksCapacitivesensorsBCSSensing of acids, bases and ultrapurewaterSmartLevel technology: Foam anddeposit compensationPTFE BCS M30TTH2-...Fill level sensingat bypass pipesCapacitivesensorsBCSContact-free sensing of acids, basesand ultrapure waterSmartLevel technology: Foam and de-posit compensation, flexible attachment(using cable ties)PPPBTBCS R08RR01-...BCS Q40BBAA-...Fill level detec-tion in contactwith the mediain tanksMicropulsetransducersBTLContact-free measuring (measurementsection protected in high-pressure resis-tant stainless steel pipe), highly accuratelevel measurement in the µm range(absolute), option of separatinglayer measurement, stainless steelmicropulse transducer (PFA coating onrequest), pressure-resistantMeasuring rod:Stainless steel(coatings onrequest) Float:Stainless steelhousing (PTFEon request)BTL7-...-KLeak monitoringof overflowchambersCapacitivesensorsBCSDetecting the smallest leakamounts at the bottom of baths,chemical resistancePTFE BCS M18TTI2-...Subject to modification and errors. The specifications in the catalog and/or in the datasheets apply.

Page 15:15www.balluff.com 15Application ProductfamilySpecialpropertiesHosingmaterialExample productWafer handling – Step by stepWafer presencecheckCapacitivesensorsBCSExtremely compact 2.5 mm design,component height with 18 mmdiameter, highly flexible 3-wireconnection cableStainless steel/PTFEBCS D18T403-...Position mea-surement of therobot carriageMagneticallycoded posi-tion mea-surementsystem BMLlinearQuick and precise (resolution down to1 µm) measurement system, systemaccuracy of up to /- 7 µm, contact-free operating principle, wear-free,measurement section up to 48 mSensor head:AluminumMagnetic tape:Rubber-ferrite/stainless steelSensor head:BML-S1H...Magnetic tape:BML-M02-A33-A3-...End positiondetection on arobot carriageInductivesensorsBESExtremely compact 8x16 mm design,4.7 mm component height, highlyflexible 3-wire connection cablePA BES R04KC-...Robot armangle measure-mentMagneticallycoded posi-tion measure-ment systemBML radial1 µm resolution (digital), compact de-sign, movement speeds up to 20 m/s,customized ring diametersSensor head:Stainless steelMagnet ring: Hardferrite, elastomeron steel ringSensor head:BML-S1F_-Q...Magnet ring: BML-M31-I30-A0-...Mini-sensors for semiconductor manufacturingLinear androtary positionsensingInductivesensorsBES(NAMUR)Low self-heating thanks to low currentconsumption, stable functional principle,reliably detects cable breaks and short-circuits, available in D4, D6.5, M5, M8and 5x5 sizesPlease contact usfor more informa-tion and productexamples.Wafer thicknessmeasurementCapacitivesensorsBCSSensing surface:PTFE 6 mm rated switching distance,integrated electronicsStainless steelhousing, sensingsurface: PTFEBCS D30T401-...Carrier presen-ce checkPhotoelec-tric diffusesensorsBOSLong range (up to 3 m),extensive range of variants (e.g.housing dimensions of M8 or 8x8),easy to operate, precise in processNickel-platedbrass housingoptical surface:PMMABOS 08M...Wafer presencecheckGlassfiber-opticsensorsBFOMetal corrugated tubing jacket for ope-rating temperatures up to 250 °C (fixedinstallation), crush-resistant, flexible,ideal for installation conditions withlimited spaceFiber BFO 18A...usable with BOS18M...Unique detection and assignment of wafers and PCBsRecordingand trackingprocess steps(wafer-carrier)IndustrialRFIDQuick data transmission, large read/write distance, 4-byte identificationnumber, data carrier for harsh environ-ments, data carriers in various formats:Disk, cylinder, block or credit card-sizedRead/write head:PBT, ASA,tag: GlassRead/write headBIS M-301-...Tag: BIS M-152-...Recordingand trackingprocess steps(wafer-carrierand PCB)VisionsensorsBVSSimple operation; read, test and verifyseveral codes at the same time in onecheckGD-AL, ABS BVS ID-3-...

Page 16:16Does your application require special housing designs?Do you need special coatings or specific materials for extremeconditions? Does implementation require special accessories?Tell us what you need. We will take care of production.SolutionInductive sensors ensure reliable valve position detection. The induc-tive sensor features a PTFE housing to protect it from acids. A redLED is encapsulated in the housing to indicate the switching statusvisually even in areas with yellow lighting. A PTFE cable rounds outthe completely chemically resistant design. Ordering code: BES049CDo you need a special cable,a certain cable length, or a special plug?We modify our connection technology to suit your application.Ensuring quick startupWe support you with preassembly, accessories combined for aspecific application and much more. Almost anything is possible.Contact us!A well-functioning system concept requiresthe best possible design engineering.Only customized electronics matched to the application enable fullutilization of technical potential. This is why we make changes to theelectronics to meet your requirements. Tell us your task. We offersolutions for implementation.TaskIn the semiconductor industry, inductive sensor solutions arerequired for detecting the positions of valves, membranes and othermetallic parts. The sensor has to be resistant to acids and immuneto failure. And the switching status has to be visible in areas opera-ting in yellow light.Order customized versions according to move text up to finish sen-tence your requirements: from preassembly to engineering services.If you like, you can get catalog products from us—sensors, systemsand accessories—adapted exactly to your specific requirements anddesigned in a custom manner. This opens up the best solutions foryour application. Because we adjust according to your specificati-ons.About the processA quick feasibility assessment is used as a basis. This involves deter-mining your requirements, evaluating them and establishing whetherthey can be solved with standard products. Now you decide whatyou want to use and give the go-ahead for production. Samples arepossible, if needed.Commissioning is made faster by means of preinstalled, application-specific products. Test runs with downtime due to interruptions area thing of the past. This increases the efficiency of your system. Thistakes the burden off you so that more time remains for your corebusiness.The benefits to you■■ Quick and transparent feasibility assessment■■ Solution for your application■■ Customized products secure your competitive advantages■■ Highest feasibility without compromises■■ Takes the burden off youCustomized ProductsTake advantage:Balluff services ensure the best solutions

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Page 18:18ServicesCustomized. According to your specifications. The best in quality.Balluff stands for highly efficient sensor technology, compact con-nection technology and an extensive range of accessories. We offercomprehensive services to support you, with customized solutionsand individualized advice. We do this completely according to yourspecifications.You receive our support over the entire life cycle of our products:Including the design and planning of your projects, testing and setupon site, and training and support. For an optimal implementation andsignificant planning security.This enables quick startup and an early start to production. Thisleads to maximum productivity and more cost-effectiveness. Learnabout your options.More informationcan be found in ourServices brochure.Application consultationby our TecSupportIndividualized expertise for yourtechnical requirements.Real-world examples:■■ Selection of the correct identification procedure for an assembly line■■ IO-Link concept as a cost-effective alternative to conventional wiring■■ System consulting for radio frequency identification (RFID): Identification of large steel pipes inadverse environments Recognizing multiple containers on a pallet in goods receivingCommissioningFaster start of production thanksto expert knowledgeReal-world examples:■■ Setting up an optical checkpoint with the vision sensor BVS■■ Consulting and support during the programming of RFID systems BIS■■ Installation and startup of a color detection application with the color sensor BFSFully customized productsSpecific versions according toyour requirements: from preas-sembly to engineering servicesReal-world examples:■■ Extending the housing of a high-pressure resistant inductive sensor BHS■■ Extra threads for the housing cover of a micropulse transducer BTL■■ Customer-specific holder for an RFID data carrier■■ Adaptation of the characteristics for analog sensors BAWTrainingMore application security withwell-founded manufacturerexpertise■■ Professional sensor use: Select operating principles,install sensors professionally and ensure the reliable operation of your application.■■ Position and distance measurement: This is how you make precise and wear-free measurements.■■ RFID: The right data at the right time at the right place.■■ Vision sensor: Using an image processing sensor, ensure manufacturing quality in three steps.■■ Vision sensor identification: Reliably identify data matrix codes withan image-processing sensor.■■ Industrial networking with IO-Link: Manage signals intelligently and cost-effectively.The right solutionHigh application securityLess time requiredSignificant cost reduction

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Page 20:HeadquartersBalluff GmbHSchurwaldstrasse 973765 Neuhausen a.d.F.GermanyPhone 49 7158 173-0Fax 49 7158 5010balluff@balluff.dewww.balluff.comDoc. No. 912410/Mat. No. 237146 ENC14; Subject to changes.Object DetectionLinear Position Sensing and MeasurementStatus Monitoring and Fluid SensorsIndustrial IdentificationIndustrial Networking and ConnectivityAccessoriesSystems and Service