Products Guide_実験炉セレクションガイド

研究開発用実験炉 製品ガイド High-temperature vacuum furance 【カーボン炉、タングステン炉】（内熱式） 1inch 2inch 3inch 4inch 6inch 8inch Mini-BENCH Max 2000C CCC heater element Vacuum or Inert Gas A) Chamber B ) Temperature Controller/PSU C) Vacuum equips (Pump, valves & Gauge) *A + B is minimum configuration. C is also acceptable if requested. Mini-BENCH-prism MiniLab-CF, -WCF Max 2000C CCC heater element Vacuum or Inert Gas - 7inch Touch panel HMI - PLC auto sequence: Pump/purge cycle & Vent - Pump/gauge, DC PSU are all stored in cabinet - Plug and play - Lid open/close: momentary switch - Safety option: Water flow meter Chamber thermostat Pop off valve EMO Max 2900C (CF) Compact footprint: 603 (W) x 603 (D) x 1171 (H) mm Max 2000C (WCF) 【SiC, TiCコーティングヒーター マルチ雰囲気炉】（内熱式） 1inch 2inch 3inch 4inch 6inch 8inch Thermic Edge furnace_TE MiniLab-CF (Max 2000C), -WCF (Max 2000C) Max 2000C Heater option: *SiC3 coating *TiC3 coating - 7” Touch panel - PLC auto sequence - Plug and play - Safety option: Water flow Chamber thermostat Pop off valve Max 2000C EMO *SiC3 coating or TiC3 coating heater option - max 8inch wafer annealing - 2900C furnace: C thermocouple & Pyrometer - PLC auto sequence, Plug and play Compact Bech-top size: 889 (W) x 503 (D) x 629 (H) mm *exclude pump 1240 (W) x 535 (D) x 1667 (H) mm *exclude pump Thermocera Japan Ltd. Tel: 03-6214-3033 Fax: 03-6214-3035 e-mail: sales@thermocera.com web site: www.thermocera.com セミオート PLC自動シーケンス セミオート PLC 自動シーケンス 手動制御

研究開発用実験炉 製品ガイド High-temperature vacuum furance 【石英反応管縦型炉】（外熱式） 1inch 2inch 3inch 4inch 6inch 8inch TVF-110, Vertical furnace Max 1200C Quartz reactor, clean wafer annealing Vacuum or Processing gases Heater: Kanthal element Wafer size: 1～4inchr K type thermocouple Quartz wafer susceptor Manual load, manual z-shift lift up 【石英反応管（横型）】ホットウオール式 熱 CVD（外熱式） 1inch 2inch 3inch 4inch 6inch 8inch Nanofurnace, Model. BWS-NANO for Carbon Nanotube, Graphene synthesis, ZnO nanowires. Max 1200C Hot wall type T-CVD 3 x MFC: CH4, Ar, H2 1 x MFC for bubbler APC pressure control with precise capaciatance manometer Rotary Pump ‘Lab View’ software Thermocera Japan Ltd. Tel: 03-6214-3033 Fax: 03-6214-3035 e-mail: sales@thermocera.com web site: www.thermocera.com 手動制御（APC 圧力コントロール） 手動制御

研究開発用実験炉 製品ガイド High-temperature vacuum furance 【ウエハーアニール装置（カスタムメイド真空チャンバー）】（内熱式） 1inch 2inch 3inch 4inch 6inch 8inch Custom made chamber with substrate heater Customer made vacuum chamber, Substrate Heater, vacuum equipments. Φ4inch_1200C, SiC coated heater Vacuum chamber, front view port We provide bespoke solutions for annealing system, heating applications that cannot be fulfilled using standard products. These systems, heaters can be any shape to suit your application. 【ウエハーアニール装置 セミオート制御 , APC 圧力コントロール】（内熱式） 1inch 2inch 3inch 4inch 6inch 8inch ANNEAL by Moorfield Max 1000C 3 types of heating element options; - Halogen lamp heater (600C) - CCC heater (1000C) - SiC coated CCC (1000C) 7inch Touch panel HMI PLC auto sequence: Pump & Vent cycle 3 x MFC’ s Precise pressure control Capacitance manometer, high-resolution pressure control Wafer size: 4inch and 6inch K type thermocouple Turbo Pump with RP (or Dry scroll) backing pump Thermocera Japan Ltd. Tel: 03-6214-3033 Fax: 03-6214-3035 e-mail: sales@thermocera.com web site: www.thermocera.com セミオート PLC自動シーケンス（APC 圧力コントロール） 手動制御