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IB303XP
このカタログについて
ドキュメント名 | Custom multiple output power supply for FIB ion source. |
---|---|
ドキュメント種別 | 製品カタログ |
ファイルサイズ | 395.7Kb |
取り扱い企業 | フューテックス株式会社 (この企業の取り扱いカタログ一覧) |
この企業の関連カタログ
このカタログの内容
Page1
Model : IB303XP Custom multiple output power supply
for FIB ion source.
Application
・Focused ion beam lithography
Product specifications
Input voltage Electric static lens supply (Referenced to GND)
90V~240VAC single phase 1.5A(50,60HZ) Output voltage: 1.0k~-30kV
Absolute voltage accuracy: Less than 0.1%
Accelerator supply (Referenced to GND)
Set ability: 14bit (2.0V LSB)
Output voltage: +1k~ +30kV Output current: 100μA max
Absolute voltage accuracy: Less than 0.1% Ripple noise: Less than 150mVp-p
Set ability: 16bit (0.5V LSB) Stability: 50ppm/1hr after 1hr
Output current: 500μA warm up
temperature coefficient: 25ppm/℃
Ripple noise: Less than 60mVp-p
Stability: 20ppm/1hr after 1hour warm up
temperature coefficients: 10ppm/℃ The other specifications
Filament supply (Referenced to Accelerator) All the outputs provide with the over voltage
Output voltage: 0~5V protection and the over current protection.
Set ability: 16bit (1mA LSB)
Output current: 0~4A External control: Optical isolated RS232C
Ripple noise: Less than 10mA p-p @3A Interlock: vacuum, thermo, HV-connection
Absolute current accuracy: ±0.01A HV connector: Customer specification
Stability: 25ppm/1hour @ 3.0A Output monitor: Accelerating voltage, Lens voltage
temperature coefficients: 15ppm/℃ Storage temp range: -5℃~ +40℃
Suppressor supply (Referenced to Accelerator) Operating temperature
Output voltage: -0.05kV~ -1.5kV Limit: +10℃~ +40℃
Absolute voltage accuracy: Less than 0.1% @300V Humidity: 80% or less
Set ability: 14bit (0.11V LSB) Insulation method: Air insulation (one molding)
Output current: 110μA max Externals size: 480mm(W) × 450(D) × 249 (H)
Ripple noise: Less than 20mVp-p Weight: 33kg
Stability: 50ppm/1hr after 1hour warm up
temperature coefficients: 25ppm/℃ The model “IB303XP” is an integrated
Extractor supply (Referenced to Accelerator) multiple output high voltage power
Output voltage: -0.6kV~ -12kV supply specifically developed for
Absolute voltage accuracy: Less than 0.1% @7.0kV
Set ability: 16bit (0.2V LSB) focused ion beam source.
Output current: 500μA
Ripple noise: Less than 30mVp-p @4.0kV
* Please ask details.
Stability: 20ppm/1hr after 1hour warm up e-mail info@futex.jp
temperature coefficients: 10ppm/℃
Electric static lens supply (Referenced to Accelerator)
Output voltage: -0.3k~-15kV
Absolute voltage accuracy: Less than 0.1%
Set ability: 16bit (0.1V LSB)
Output current: 100μA max FUTEX CO., LTD. http://www.futex.jp
Ripple noise: Less than 100mVp-p TEL:+81-42-549-2888 FAX:+81-42-549-2900
Stability: 50ppm/1hr after 1hour warm up 2-28-3 Fukujima-cho Akishima Tokyo, Japan
temperature coefficient: 25ppm/℃
Update: Jun,18, 2012