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Custom multiple output power supply for FIB ion source.

製品カタログ

IB303XP

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ドキュメント名 Custom multiple output power supply for FIB ion source.
ドキュメント種別 製品カタログ
ファイルサイズ 395.7Kb
取り扱い企業 フューテックス株式会社 (この企業の取り扱いカタログ一覧)

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このカタログの内容

Page1

Model : IB303XP Custom multiple output power supply for FIB ion source. Application ・Focused ion beam lithography Product specifications Input voltage Electric static lens supply (Referenced to GND) 90V~240VAC single phase 1.5A(50,60HZ) Output voltage: 1.0k~-30kV Absolute voltage accuracy: Less than 0.1% Accelerator supply (Referenced to GND) Set ability: 14bit (2.0V LSB) Output voltage: +1k~ +30kV Output current: 100μA max Absolute voltage accuracy: Less than 0.1% Ripple noise: Less than 150mVp-p Set ability: 16bit (0.5V LSB) Stability: 50ppm/1hr after 1hr Output current: 500μA warm up temperature coefficient: 25ppm/℃ Ripple noise: Less than 60mVp-p Stability: 20ppm/1hr after 1hour warm up temperature coefficients: 10ppm/℃ The other specifications Filament supply (Referenced to Accelerator) All the outputs provide with the over voltage Output voltage: 0~5V protection and the over current protection. Set ability: 16bit (1mA LSB) Output current: 0~4A External control: Optical isolated RS232C Ripple noise: Less than 10mA p-p @3A Interlock: vacuum, thermo, HV-connection Absolute current accuracy: ±0.01A HV connector: Customer specification Stability: 25ppm/1hour @ 3.0A Output monitor: Accelerating voltage, Lens voltage temperature coefficients: 15ppm/℃ Storage temp range: -5℃~ +40℃ Suppressor supply (Referenced to Accelerator) Operating temperature Output voltage: -0.05kV~ -1.5kV Limit: +10℃~ +40℃ Absolute voltage accuracy: Less than 0.1% @300V Humidity: 80% or less Set ability: 14bit (0.11V LSB) Insulation method: Air insulation (one molding) Output current: 110μA max Externals size: 480mm(W) × 450(D) × 249 (H) Ripple noise: Less than 20mVp-p Weight: 33kg Stability: 50ppm/1hr after 1hour warm up temperature coefficients: 25ppm/℃ The model “IB303XP” is an integrated Extractor supply (Referenced to Accelerator) multiple output high voltage power Output voltage: -0.6kV~ -12kV supply specifically developed for Absolute voltage accuracy: Less than 0.1% @7.0kV Set ability: 16bit (0.2V LSB) focused ion beam source. Output current: 500μA Ripple noise: Less than 30mVp-p @4.0kV * Please ask details. Stability: 20ppm/1hr after 1hour warm up e-mail info@futex.jp temperature coefficients: 10ppm/℃ Electric static lens supply (Referenced to Accelerator) Output voltage: -0.3k~-15kV Absolute voltage accuracy: Less than 0.1% Set ability: 16bit (0.1V LSB) Output current: 100μA max FUTEX CO., LTD. http://www.futex.jp Ripple noise: Less than 100mVp-p TEL:+81-42-549-2888 FAX:+81-42-549-2900 Stability: 50ppm/1hr after 1hour warm up 2-28-3 Fukujima-cho Akishima Tokyo, Japan temperature coefficient: 25ppm/℃ Update: Jun,18, 2012