高精度微差圧トランスデューサ　MLV

Page 1:a16035VineyardBlvd.MorganHill,CA95037p4082254314f4082252079ewww.allsensors.comallsensorsAll Sensors DS-0274 Rev CThe MLV Series Compensated Sensor is based on All Sensors’CoBeam2 TMTechnology. The device provides a high output signal at alow operating voltage while maintaining comparable output levels to traditional equivalent compensated millivolt sensors operat-ing at higher voltages. This lower supply voltage gives rise to improved warm-up shift while the CoBeam2Technology itself reducespackage stress susceptibility resulting in improved overall long term stability. The technology also vastly improves position sensitivitycompared to conventional single die devices.These calibrated and compensated sensors give an acurate and stable output over a wide temperature range. This series is intendedfor use with non-corrosive, non-ionic working fluids such as air, dry gases and the like. A protective parylene coating is optionallyavailable for moisture/harsh media protection. The output is also ratiometric to the supply voltage and designed to operate at 5.0volts DC.• 1 to 30 inH2O & 5 to 150 PSI Pressure Ranges• 5V Operation• High Output• Low Power Consumption• Excellent Position Sensitivity• Low Warm-Up Shift• Enhanced Front to Back Linearity• Protective Parylene Coating Option• Medical Breathing• Environmental Controls• HVAC• Industrial Controls• Portable/Hand-Held EquipmentGeneral DescriptionApplicationsFeaturesMLV Series Low Voltage Pressure SensorsDevice Operating Range Proof Pressure Burst Pressure Nominal SpanMLV-L01D ±1 inH2O 100 inH2O 300 inH2O 7 mVMLV-L02D ±2 inH2O 100 inH2O 300 inH2O 10 mVMLV-L05D ±5 inH2O 200 inH2O 300 inH2O 15 mVMLV-L10D ±10 inH2O 200 inH2O 300 inH2O 20 mVMLV-L20D ±20 inH2O 200 inH2O 500 inH2O 20 mVMLV-L30D ±30 inH2O 200 inH2O 800 inH2O 20 mVMLV-005D ±5 PSI 10 PSI 30PSI 25 mVMLV-015D ±15 PSI 60 PSI 120 PSI 37.5 mVMLV-015A 0 - 15 PSIA 60 PSI 120 PSI 37.5 mVMLV-030D ±30 PSI 90 PSI 150 PSI 37.5 mVMLV-100D ±100 PSI 200 PSI 250 PSI 41.67 mVMLV-150D ±150 PSI 200 PSI 250 PSI 37.5 mVStandard Pressure Ranges Equivalent Circuit Vout-Vout Vsupply-Vsupply

Page 2:MLV Series Low Voltage Pressure SensorsParameter Min Typ Max Units NotesOutput SpanL01D @ 1 inH2O 6.0 7.0 8.0 mV 4L02D @ 2 inH2O 9.0 10.0 11.0 mV 4L05D @ 5 inH2O 14.0 15.0 16.0 mV 4L10D @ 10 inH2O 19.0 20.0 21.0 mV 4L20D @ 20 inH2O 19.0 20.0 21.0 mV 4L30D @ 30 inH2O 19.0 20.0 21.0 mV 4Span Temperature Shift (0°C to 50°C) - - ±250 uV 1Offset Voltage @ Zero Diff. Pressure - - ±500 uV -Offset Temperature Shift (0°C to 50°C)L01D, L02D, L05D - - ±250 uV 1L10D, L20D, L30D - - ±200 uV 1Offset Warm-up Shift - - ±50.0 uV 2Offset Position Sensitivity (1g)L01D - - ±20.0 uV 6L02D - - ±15.0 uV 6L05D, L10D, L20D, L30D - - ±10.0 uV 6Offset Long Term Drift (One Year)L01D, L02D, L05D - ±150 - uV -L10D, L20D, L30D - ±100 - uV -Linearity, Hysteresis Error - 0.10 0.30 %FSS 3Response Time (10% to 90% Pressure Response) - 500 - us -Front to Back Linearity - 0.75 - %FSS 5Input Resistance - 12.0 - k ohm -Output Resistance - 3.0 - k ohm -Performance Characteristics for MLV Series (InH2O)All parameters are measured at 5.0 volt excitation and room temperature unless otherwise specified. Pressure measurements are with positivepressure applied to PORT B (the only port for the single port configuration packages).Pressure Sensor Maximum Ratings Environmental SpecificationsSupply Voltage (Vs) 12 VdcCommon Mode PressureInH2O Devices (L01, L02, L05, L10, L20, L30) 10 psigPSI Devices (005, 015, 030, 100, 150) 50 psigLead Temperature (soldering 2-4 sec.) 270 °CTemperature RangesCompensated 0°C to 50°C Operating -25°C to 85 °C Storage -40°C to 125 °CHumidity Limits 0 to 95% RH (non condensing)

Page 3:a16035VineyardBlvd.MorganHill,CA95037p4082254314f4082252079ewww.allsensors.comallsensorsAll Sensors DS-0274 Rev CParameter Min Typ Max Units NotesOutput Span005D @ 5 PSI 24.75 25.0 25.25 mV 4015D @ 15 PSI 37.13 37.50 37.88 mV 4015A @ 15 PSIA 37.13 37.50 37.88 mV 4030D @ 30 PSI 37.13 37.50 37.88 mV 4100D @ 100 PSI 41.25 41.67 42.08 mV 4150D @ 150 PSI 37.08 37.50 37.92 mV 4Span Temperature Shift (0°C to 50°C) - - ±1.0 %FSS 1Offset Voltage @ Zero Diff. Pressure005D @ 5 PSI - - 125 uV -015D @ 15 PSI - - 125 uV -015A @ 15 PSIA - - 208 uV -030D @ 30 PSI - - 125 uV -100D @ 100 PSI - - 125 uV -150D @ 150 PSI - - 125 uV -Offset Warm-Up Shift - ±20 uV 2Offset Long Term Drift (one year) - ±100 - uV -Linearity, Hysteresis Error - 0.20 0.50 %FSS 3Response Time (10% to 90% Pressure Response) - 500 - us -Front to Back Linearity - 2.5 - %FSS 5Input Resistance - 12.0 - k ohm -Output Resistance - 3.0 - k ohm -Performance Characteristics for MLV Series (PSI)All parameters are measured at 5.0 volt excitation and room temperature unless otherwise specified. Pressure measurements are with positive pressure appliedto PORT B (the only port for the single port configuration packages). Pressure is applied to Port A for absolute devices in A-Package.Specification Notesnote 1: Shift is relative to 25°C.note 2: Shift is within the first hour of excitation applied to the device.note 3: Measured at one-half full scale rated pressure using best straight line curve fit.note 4: The span is the algebraic difference between full scale output voltage and the offset voltage.note 5: Front-Back Linerity computed as: Lin FBSpanFrontSpanBack1−100⋅ %note 6: Parameter is characterized and not 100% tested.

Page 4:MLV Series Low Voltage Pressure SensorsHow To OrderTABLE 1: Available E-Series Package ConfigurationsNOTE 1) Parylene Coating: Parylene coating provides a moisture barrier and protection from some harsh media. Consult factory for ap-plicability of Parylene for the target application and sensor type.(See NOTE 1 below)E PackageExample: MLV-L02D-E1ND-NExample: MLV-L02D-A6BBF-NA PackageSIP DIP J Lead SMT SIP DIP J Lead SMTDual PortSame SideE1NS E1ND E1NJN/AE1BS E1BDN/A N/ADual PortOppositeSideE2NS E2ND E2NJN/AE2BS E2BDN/A N/ASingle Port(Gage)EGNS EGND EGNJ EGNL EGBS EGBD EGBJ EGBLLead StyleNon-Barbed Lid Barbed LidPortLead StyleSeriesMLV- -A6 -Port FittingsPressure RangeCoatingOp on Descrip onA No Port CutB Two Ports Cut 0.085"C Two Ports Cut 0.100"D Two Ports Cut 0.150"E One Port (A) Cut 0.080"F One Port (A) Cut 0.370"Op on Descrip onA No Fi ngsB Barb Fi ng Port A OnlyC Barb Fi ng Port B OnlyD Barb Fi ngs Ports A & BOp on Descrip onF Flat (Straig ht)Q Right Angle 0.075"R Right Angle 0.100"J Jogged BendOp on Descrip onN No Coa ngP Paryle ne Coa ngL01D 1 inH2OL02D 2 inH2OL05D 5 inH2OL10D 10 in H2OL20D 20 in H2OL30D 30 in H2O005D 5 PSI015D 15 PSI015A 15 PSIA030D 30 PSI100D 100 PSI150D 150 PSIMLV- -E -Op on Descrip onN No Coa ngP Paryle ne Coa ngSeriesPressure Range CoatingPort OrientationLid StyleLead TypeOp on Descrip on1 Dual Port Same Side2 Dual Port Oppo si te Sid eG Single Port (Gage)Op on Descrip onNN on-BarbedBB arbedOp on Descrip onSS IPDD IPJJ -Lea d SMTLL ow Pro le DIPL01D 1 inH2OL02D 2 inH2OL05D 5 inH2OL10D 10 in H2OL20D 20 in H2OL30D 30 in H2O005D 5 PSI015D 15 PSI015A 15 PSIA030D 30 PSISIPDIPJ-Lead SMTLow Profile DIPNon-BarbedBarbed

Page 5:a16035VineyardBlvd.MorganHill,CA95037p4082254314f4082252079ewww.allsensors.comallsensorsAll Sensors DS-0274 Rev CPackage DrawingsNOTES1) Dimensions are in inches [mm].2) For suggested pad layout,see drawing: PAD-0921.590.1000.8500.510.0200.4203.8127.4320.321.08010.673.560.8000.1400.42010.672.540.1500.250(min)[6.35]0.2105.330.0501.27Pin 1Identifier0.1740.5500.12512.192.404.813.180.4800.254.4213.970.1890.0100.0940.3448.74Port BPort AA6 Package (Without Options)0.1854.690.1503.81A- No Port Cut Configuration D- Two Ports Cut 0.150" Configuration4.500.1770.3709.40F- Port A Cut 0.370" Configuration0.1874.740.1002.54C- Two Ports Cut 0.100" Configuration0.1874.750.0852.16E- Port A cut 0.080" Configuration4.760.1870.0802.03B- Two Ports Cut 0.085" ConfigurationExample: MLV-L10D-A6xAF-NPort Cut OptionsA-Package: Port Cut OptionsPinout(Gage)1) N/C2) Vs3) Out4) Gnd5) -Out6) N/CPinout(Absolute)1) N/C2) Vs3) -Out4) Gnd5) Out6) N/C

Page 6:MLV Series Low Voltage Pressure Sensors0.250 (min)[6.35]0.100[2.60]0.250.0100.1363.45F- Flat (Straight) Configuration0.250.0100.1363.450.150(min)[3.81]R- Right Angle 0.100" Configuration0.075[1.88][4.70]0.0100.250.1850.0812.060.225 (min)[5.72]0.250.0100.1363.450.175(min)[4.45]Q- Right Angle 0.075" ConfigurationJ- Jogged Bend ConfigurationD- Barb Fitting Ports A and B ConfigurationB- Barb Fitting Port A Only Configuration2.371.200.0470.0812.061.120.0440.0930.1854.712.371.240.0490.0812.061.130.0450.0930.1864.73NOTE: Port Cut Configuration "D" Shown As Reference.C- Barb Fitting Port B Only ConfigurationA- No Fittings Configuration2.371.200.0470.0812.061.130.0450.0930.1874.75Example: MLV-L10D-A6DxF-NPort Fitting OptionsA-Package: Port Fitting OptionsExample: MLV-L10D-A6AAx-NLead Bend OptionsA-Package: Lead Bend Options

Page 7:a16035VineyardBlvd.MorganHill,CA95037p4082254314f4082252079ewww.allsensors.comallsensorsAll Sensors DS-0274 Rev CE1NS Package0.640.0250.2827.176.450.2549.800.3860.0100.250.1924.880.380(nom)12.700.5000.42510.79[9.65]2.040.510.42510.790.62015.750.1070.0822.730.0202.100.0800.1002.54Port APort BPin 1 2 3 4NOTES1)Dimensions are in inches [mm]2)For suggested pad layout, see drawing: PAD-01E1BS Package4.880.1929.806.450.2540.640.0250.3860.0100.250.3609.15Port BPort A0.510.380(nom)[9.65]2.540.0200.0881.680.10010.800.42510.802.112.242.730.4250.10712.700.5000.08315.750.6200.0660.0451.14Pin 1 2 3 42)For suggested pad layout, see drawing: PAD-01NOTES1)Dimensions are in inches [mm]Pinout1) Gnd2) Out3) Vs4) -OutPinout1) Gnd2) Out3) Vs4) -Out

Page 8:MLV Series Low Voltage Pressure SensorsE2NS Package2.127.170.2820.640.0250.250.0100.0840.3869.80Pin 1 2 3 42.73[9.65]0.380(nom)0.0822.1015.750.42510.790.50012.700.0200.42510.790.1072.040.510.6200.0800.1002.54Port BPort ANOTES1)Dimensions are in inches [mm]2)For suggested pad layout, see drawing: PAD-01E2BS PackagePin 1 2 3 4Port BPort A0.50012.700.62015.750.0882.2410.800.4250.51 2.542.730.42510.800.1070.0200.380(nom)[9.65]2.110.0831.680.0660.1000.0451.140.3609.150.250.640.0259.800.3860.0100.0842.122)For suggested pad layout, see drawing: PAD-01NOTES1)Dimensions are in inches [mm]Pinout1) Gnd2) Out3) Vs4) -OutPinout1) Gnd2) Out3) Vs4) -Out

Page 9:a16035VineyardBlvd.MorganHill,CA95037p4082254314f4082252079ewww.allsensors.comallsensorsAll Sensors DS-0274 Rev CPinout1) Gnd2) Out3) Vs4) -OutPinout1) Gnd2) Out3) Vs4) -OutEGNS Package0.252.120.640.3869.800.0840.0250.0100.1543.90Absolute devicesare without port hole.4.418.130.3200.1740.0320.81 Port B0.42510.790.62015.750.1070.380(nom)[9.65]0.512.102.730.0820.02010.790.4252.0412.700.5000.0800.1002.54Pin 1 2 3 4NOTES1)Dimensions are in inches [mm]2)For suggested pad layout, see drawing: PAD-01EGBS Package0.0250.640.0100.250.3869.80Pin 1 2 3 4Port B0.0832.110.50012.700.0660.62015.752.240.1000.380(nom)[9.65]2.730.511.680.42510.800.0882.540.42510.800.1070.0200.0451.14Absolute devices arewithout port hole0.1744.410.3208.130.0320.812)For suggested pad layout, see drawing: PAD-01NOTES1)Dimensions are in inches [mm]

Page 10:MLV Series Low Voltage Pressure SensorsPinout1) Gnd2) Out3) Vs4) -Out5) Do Not Connect6) Do Not Connect7) Do Not Connect8) Do Not ConnectPinout1) Gnd2) Out3) Vs4) -Out5) Do Not Connect6) Do Not Connect7) Do Not Connect8) Do Not ConnectE1ND Package0.2255.720.0180.46Pin 1 2 3 4Port BPort APin 8 7 6 50.1070.0802.1010.790.4250.5002.7312.7010.7915.750.4252.040.6200.0820.1002.540.640.1924.880.0580.250.6307.170.2820.0259.800.386161.486.450.2540.0100.350(min)8.89NOTES1) Dimensions are in inches [mm]2) For suggested pad layout, see drawing: PAD-03E1BD Package1.480.3869.800.6300.25168.89(min)0.2546.450.0254.880.1920.640.0580.0100.3500.3609.150.2255.720.0180.46Pin 1 2 3 4Port BPort APin 8 7 6 51.680.62010.800.4251.140.50015.750.0662.730.0452.1110.800.4252.5412.70 0.0830.1070.1000.0882.24NOTES1) Dimensions are in inches [mm]2) For suggested pad layout, see drawing: PAD-03

Page 11:a16035VineyardBlvd.MorganHill,CA95037p4082254314f4082252079ewww.allsensors.comallsensorsAll Sensors DS-0274 Rev CE2ND Package0.250.6307.170.2820.642.120.0840.0259.800.3861.480.058160.0100.350(min)8.890.2255.720.0180.46Pin 1 2 3 4Pin 8 7 6 5Port BPort A2.1010.790.42512.700.50010.790.4250.62015.750.1072.732.040.0800.0820.1002.54NOTES1) Dimensions are in inches [mm]2) For suggested pad layout, see drawing: PAD-03E2BD PackagePort BPin 1 2 3 4Port APin 8 7 6 50.0830.6200.42510.800.1070.1000.0451.682.732.110.4251.140.50012.702.5415.750.06610.800.0882.248.890.640.05816(min)0.6300.250.3600.3509.801.489.150.0250.3860.0100.0842.120.2255.720.0180.46NOTES1) Dimensions are in inches [mm]2) For suggested pad layout, see drawing: PAD-03Pinout1) Gnd2) Out3) Vs4) -Out5) Do Not Connect6) Do Not Connect7) Do Not Connect8) Do Not ConnectPinout1) Gnd2) Out3) Vs4) -Out5) Do Not Connect6) Do Not Connect7) Do Not Connect8) Do Not Connect

Page 12:MLV Series Low Voltage Pressure SensorsEGND Package0.250.0100.630160.642.120.0840.0259.800.3861.480.1540.0583.900.350(min)8.89Absolute devicesare without port hole.4.418.130.3200.1740.0320.810.0180.460.2255.72NOTES1) Dimensions are in inches [mm]30-DAP:gniwardees,tuoyaldapdetseggusroF)24321niPPin 8 7 6 5Port B2.1010.790.42512.700.50010.790.4250.62015.750.1072.732.040.0800.0820.1002.54EGBD Package160.1694.280.642.120.0840.0259.800.3860.6300.250.0100.350(min)8.89Absolute devicesare without port hole.4.418.130.3200.1740.0320.810.0180.460.2005.08Pin 1 2 3 4Pin 8 7 6 5Port B0.42510.8012.700.5000.6200.08315.752.540.4250.10010.800.1072.112.731.680.0662.240.0880.0451.14NOTES1) Dimensions are in inches [mm]2) For suggested pad layout, see drawing: PAD-03Pinout1) Gnd2) Out3) Vs4) -Out5) Do Not Connect6) Do Not Connect7) Do Not Connect8) Do Not ConnectPinout1) Gnd2) Out3) Vs4) -Out5) Do Not Connect6) Do Not Connect7) Do Not Connect8) Do Not Connect

Page 13:a16035VineyardBlvd.MorganHill,CA95037p4082254314f4082252079ewww.allsensors.comallsensorsAll Sensors DS-0274 Rev CE1NJ PackageA0.2546.457.170.2829.800.3860.0250.640.1924.880.1553.94DETAIL ASCALE 4 : 10.0590.810.032R1.510.0100.25Pin 1 2 3 4Pin 8 7 6 52.5410.790.42512.700.5000.62015.7510.790.4250.0822.102.732.040.0800.1000.1070.0501.27Port APort B2)For suggested pad layout, see drawing: PAD-10NOTES1)Dimensions are in inches [mm]E2NJ Package0.1553.94DETAIL ASCALE 4 : 10.0590.810.032R1.510.0100.25A7.170.2820.6300.386160.649.800.0250.0842.12Pin 1 2 3 4Pin 8 7 6 5Port BPort A0.50012.700.42510.790.62015.750.1070.0820.0800.1002.102.732.042.5410.790.4250.0501.27NOTES1)Dimensions are in inches [mm]2)For suggested pad layout, see drawing: PAD-10Pinout1) Gnd2) Out3) Vs4) -Out5) Do Not Connect6) Do Not Connect7) Do Not Connect8) Do Not ConnectPinout1) Gnd2) Out3) Vs4) -Out5) Do Not Connect6) Do Not Connect7) Do Not Connect8) Do Not Connect

Page 14:MLV Series Low Voltage Pressure SensorsEGNJ PackageA0.0250.630169.800.3862.120.640.0840.1543.90Port B2.540.42510.790.50012.700.42510.790.1000.62015.750.1072.040.0820.0802.732.100.0501.27Pin 1 2 3 4Pin 8 7 6 5Absolute devicesare without port hole.4.418.130.3200.1740.0320.810.1553.94DETAIL ASCALE 4 : 10.059R0.0320.811.510.0100.25NOTES1)Dimensions are in inches [mm]2)For suggested pad layout, see drawing: PAD-10EGBJ PackageAbsolute devicesare without port hole.4.418.130.3200.1740.0320.810.1553.94DETAIL ASCALE 4 : 10.0590.810.032R1.510.0100.25A0.3869.800.0250.630162.120.640.0840.1694.28Pin 1 2 3 4Pin 8 7 6 5Port B2.112.730.4250.05012.700.0830.50015.750.0660.0452.541.6810.801.270.6201.140.1000.4250.10710.800.0882.242)For suggested pad layout, see drawing: PAD-10NOTES1)Dimensions are in inches [mm]Pinout1) Gnd2) Out3) Vs4) -Out5) Do Not Connect6) Do Not Connect7) Do Not Connect8) Do Not ConnectPinout1) Gnd2) Out3) Vs4) -Out5) Do Not Connect6) Do Not Connect7) Do Not Connect8) Do Not Connect

Page 15:a16035VineyardBlvd.MorganHill,CA95037p4082254314f4082252079ewww.allsensors.comallsensorsAll Sensors DS-0274 Rev CEGBL Package160.1694.280.642.120.0840.0259.800.3860.6300.250.0100.350(min)8.89Absolute devicesare without port hole.4.418.130.3200.1740.0320.81Pin 1 2 3 4Pin 8 7 6 5Port B0.42510.8012.700.5000.6200.08315.752.540.4250.10010.800.1072.112.731.680.0662.240.0880.0451.140.460.0180.0802.03NOTES1) Dimensions are in inches [mm]2) For suggested pad layout, see drawing: PAD-03EGNL Package0.250.0100.630160.642.120.0840.0259.800.3861.480.1540.0583.900.350(min)8.89NOTES1) Dimensions are in inches [mm]30-DAP:gniwardees,tuoyaldapdetseggusroF)2Absolute devicesare without port hole.4.418.130.3200.1740.0320.810.460.0180.1052.674321niPPin 8 7 6 5Port B2.1010.790.42512.700.50010.790.4250.62015.750.1072.732.040.0800.0820.1002.54Pinout1) Gnd2) Out3) Vs4) -Out5) Do Not Connect6) Do Not Connect7) Do Not Connect8) Do Not ConnectPinout1) Gnd2) Out3) Vs4) -Out5) Do Not Connect6) Do Not Connect7) Do Not Connect8) Do Not Connect

Page 16:MLV Series Low Voltage Pressure SensorsAll Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuitdescribed herein, neither does it convey any license under its patent rights nor the rights of others.Package CharacteristicsSuggested Pad LayoutPAD-01(Finished Size)0.035~0.039 inch0.100(typ.)2.54PAD-03(Finish Size)0.035~0.039 inch0.630160.100(typ.)2.54(typ.)0.1001.270.59014.992.540.0500.0902.29PAD-10Approximate Port VolumePackage ID Port A Port B Units Notes Weight Units NotesA6AAx 132 33.6 mm31 9.3 Grams2A6BAx 119 20.3 mm31 8.7 Grams2A6CAx 119 20.5 mm31 8.8 Grams2A6DAx 120 21.3 mm31 8.8 Grams2A6EAx 119 33.6 mm31 8.9 Grams2A6FAx 125 33.6 mm31 9.2 Grams2E1Nx 174 168 mm3- 1.2Grams-E2Nx 174 168 mm3- 1.2Grams-EGNx 1.4 168 mm3- 0.9Grams-Package NotesNote 1: Add 4.5 mm3per port with barb fitting.Note 2: Add 0.15 gram per barb fitting.Product LabelingLot NumberPart NumberCompanyExample Device LabelAll SensorsR9J21-3A6AAF-NMLV-L02D* 5 PSI to 150 PSI devices may not be assembled with CoBeam2 TMTechnology.