高出力LD励起Qスイッチレーザ（イントラキャビティーデザイン）

High-Power Q-Switched Diode-Pumped UV and Green Laser Q-Series® www.lumentum.com Data Sheet

High-Power Q-Switched Diode-Pumped UV and Green Laser Lumentum Q-Series lasers lead the market for high-power Q-switched diode-pumped UV and green lasers used for a wide variety of high-precision, micromachining applications. Whether for high-pulse-energy processing of materials such as ceramics, high-repetition-rate processing of materials such as sapphire or silicon, or patterning thin-film solar cells, the Q-Series lasers deliver unsurpassed performance combined with industry-leading uptime. Due to the self-stabilizing characteristics of intracavity UV Key Features harmonic generation, all Q-Series lasers exhibit inherently high • Highest commercially available pulse energy and peak power energy, high pulse-to-pulse stability and long-term output power • Tighter process control due to superior energy stability stability. In addition, the excellent thermal management of the enabled by unique intracavity harmonic generation unique Nd: YAG-based direct-coupled pump (DCP) architecture • Capable of processing the widest range of materials due to achieves excellent beam quality over a wide range of operating large selection of pulse energies, pulse widths, and conditions and maintains exceptionally stable beam position and repetition rates profile, which is important for processes requiring accurate feature placement. These advantages enable Q-Series lasers to • High reliability due to low fluence in harmonic crystals and achieve the tightest possible process tolerances for no cavity optic coatings exposed to UV micromachining and other materials-processing applications. • 355 and 532 nm outputs available • Customization available upon request Applications • Wafer scribing • Full-cut wafer dicing • Low-k dielectric grooving • Micromachining of silicon, sapphire, ceramic, and metal • Micro-via drilling • PCB and flexboard cutting www.lumentum.com 2

High-Power Q-Switched Diode-Pumped UV and Green Laser Q-Series 355 nm Laser Head (Specifications in millimeters unless otherwise noted. Dimensions include mounting pads.) 10.00 " 250 LOCATION POINT, 3X 2X 6.4 222.1 5.00 " 125 125 LASER BEAM EXIT 5.00" 812.8 LASER BEAM EXIT COOLING WATER CONNECTIONS, 2X 2X 22.7 139.7 18.4 86.1 ±1 50.5 55.6 23.9 69.9 UMBILICAL CABLE Power Supply and Chiller (Specifications in millimeters unless otherwise noted.) 88.4 76.2 17.3" 464.8 [440] 482.6 21" OR 25" [533 OR 640] 360.9 10.4" [264] 13.0" [329] www.lumentum.com 3

High-Power Q-Switched Diode-Pumped UV and Green Laser Q30X 355 nm Models Typical Performance 14 500 Q304 12 400 Q301 10 Q302 8 300 6 Q303 200 4 100 2 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 Repetition Rate (kHz) Q33X Low Power 355 nm Models Typical Performance 14 500 12 400 10 300 8 Q331 6 200 Q332 4 Q333 100 2 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 Repetition Rate (kHz) Q20X 532 nm Models Typical Performance 20 300 Q201 Q202 250 15 200 10 150 100 5 50 0 0 0 10 20 30 40 50 60 70 Repetition Rate (kHz) www.lumentum.com 4 532 nm Average Power (W) 355 nm Average Power (W) 355 nm Average Power (W) Pulsewidth (ns) Pulsewidth (ns) Pulsewidth (ns)

High-Power Q-Switched Diode-Pumped UV and Green Laser Q-Series Laser Head Specifications Parameter Q301-HD-1000R Q302-HD-1000R Q303-HD-1000R Q304-HD-1000R Wavelength 355 nm 355 nm 355 nm 355 nm Polarization >100:1, horizontal >100:1, horizontal >100:1, horizontal >100:1, horizontal Spatial mode TEM00 TEM00 TEM00 TEM00 M-squared1 <1.2 <1.2 <1.2 <1.2 Waist location1 (internal, from beam exit) 42±0.4 cm 42±0.4 cm 42±0.4 cm 42±0.4 cm Waist diameter1, 1/e2 0.26 mm nominal 0.26 mm nominal 0.26 mm nominal 0.25 mm nominal Beam roundness >85% circular >85% circular >85% circular >85% circular Beam divergence1, full angle 1.8±0.35 mrad 1.8±0.35 mrad 1.8±0.35 mrad 2.0±0.35 mrad Beam pointing drift, full angle <10 μrad/°C <10 μrad/°C <10 μrad/°C <10 μrad/°C Pointing drift, over 8 hours, full angle2 <50 μrad <50 μrad <50 μrad <50 μrad Beam position accuracy, unit to unit <2.5 mm from nominal <2.5 mm from nominal <2.5 mm from nominal <2.5 mm from nominal Beam pointing accuracy, unit to unit <1° from nominal <1° from nominal <1° from nominal <1° from nominal Controller repetition rate Internally triggered 1 kHz to 250 kHz 1 kHz to 250 kHz 1 kHz to 250 kHz 1 kHz to 250 kHz Externally triggered 0 to 250 kHz 0 to 250 kHz 0 to 250 kHz 0 to 250 kHz Constant pulse energy range <10 kHz <30 kHz <70 kHz <40 kHz Average output power3 At 10, 20, and 30 kHz ≥10.0, 8.0 and 6.0 W - - At 30, 50, and 70 kHz - ≥8.0, 6.8, and 5.0 W - At 70, 100, and 130 kHz - - ≥6.5, 4.5, and 2.9 W - At 40, 60, and 90 kHz - - - ≥11.0, 9.5, 6.3 W Pulse width4 At 10, 20, and 30 kHz 33±10, 49±15, 62±15 ns - - - At 30, 50, and 70 kHz - 78±20, 107±25, 135±30 ns - - At 70, 100, and 130 kHz - 120±35, 160±45, 200±60 ns - At 40, 60, and 90 kHz - - - 95±30, 130±35, 180±50 ns Pulse energy fluctuations5 At 10, 20, and 30 kHz <1.0%, 10 – 30 kHz - - - At 30, 50, and 70 kHz - <1.5%, 30 – 50 kHz - - At 70, 100, and 130 kHz - - <1.5%, <2.0%, <2.5% - At 40, 60, and 90 kHz - - - <1.5%, 40 – 90 kHz Power drift over 8 hours2, 6 <±2% <±2% <±2% <±2% Warm-up time From cold start <20 minutes <20 minutes <20 minutes <20 minutes From standby <10 minutes <10 minutes <10 minutes <10 minutes Operating ambient temperature 15 to 35°C 15 to 35°C 15 to 35°C 15 to 35°C Relative humidity, non-condensing 10 to 80% 10 to 80% 10 to 80% 10 to 80% Weight 14.5 kg 14.5 kg 14.5 kg 14.5 kg 1. Specifications hold over different repetition rate ranges, depending on the laser model, as follows: Q301 from 10 to 30 kHz, for Q302 from 30 to 70 kHz, for Q303 from 70 to 130 kHz, and Q304 from 40 to 90 kHz. 2. Ambient temperature constant ±2°C. 3. Averaged for 1 hour after >80 minutes of continuous operation. 4. FWHM pulse duration measured according to method detailed in Lumentum application note titled “Optical Pulse Width Measurement Techniques for Q-Series Lasers.” 5. Pulse Energy Fluctuations = σ / μ x 100%, σ = standard deviation, μ = average pulse energy. 6. Measured after more than 80 minutes of continuous operation. www.lumentum.com 5

High-Power Q-Switched Diode-Pumped UV and Green Laser Q-Series Laser Head Specifications (Continued) Parameter Q331-HD-1000R Q332-HD-1000R Q333-HD-1000R Wavelength 355 nm 355 nm 355 nm Polarization >100:1, horizontal >100:1, horizontal >100:1, horizontal Spatial mode TEM00 TEM00 TEM00 M-squared1 <1.2 <1.2 <1.2 Waist location1 (internal, from beam exit) 42±0.4 cm 42±0.4 cm 42±0.4 cm Waist diameter1, 1/e2 0.26 mm nominal 0.26 mm nominal 0.26 mm nominal Beam roundness >85% circular >85% circular >85% circular Beam divergence1, full angle 1.8±0.35 mrad 1.8±0.35 mrad 1.8±0.35 mrad Beam pointing drift, full angle <10 μrad/°C <10 μrad/°C <10 μrad/°C Pointing drift, over 8 hours, full angle2 <50 μrad <50 μrad <50 μrad Beam position accuracy, unit to unit <2.5 mm from nominal <2.5 mm from nominal <2.5 mm from nominal Beam pointing accuracy, unit to unit <1° from nominal <1° from nominal <1° from nominal Controller repetition rate Internally triggered 1 kHz to 250 kHz 1 kHz to 250 kHz 1 kHz to 250 kHz Externally triggered 0 to 250 kHz 0 to 250 kHz 0 to 250 kHz Constant pulse energy range <10 kHz <30 kHz <70 kHz Average output power3 At 10, 20, and 30 kHz ≥5.0, 4.0 and 3.0 W - - At 30, 50, and 70 kHz - ≥4.0, 3.4, and 2.5 W - At 70, 100, and 130 kHz - - ≥3.6, 2.5, and 1.6 W Pulse width4 At 10, 20, and 30 kHz 34±10, 52±15, 69±15 ns - - At 30, 50, and 70 kHz - 69±20, 94±25, 121±34 ns - At 70, 100, and 130 kHz - 120±35, 160±45, 200±60 ns Pulse energy fluctuations5 At 10, 20, and 30 kHz <2.0%, 10 – 30 kHz - - At 30, 50, and 70 kHz - <3%, 30 – 70 kHz - At 70, 100, and 130 kHz - - <3%, 70 - 130 kHz Power drift over 8 hours2, 6 <±2% <±2% <±2% Warm-up time From cold start <20 minutes <20 minutes <20 minutes From standby <10 minutes <10 minutes <10 minutes Operating ambient temperature 15 to 35°C 15 to 35°C 15 to 35°C Relative humidity, non-condensing 10 to 80% 10 to 80% 10 to 80% Weight 14.5 kg 14.5 kg 14.5 kg 1. Specification holds over different repetition rate ranges, depending on the laser model, as follows: Q331 from 10 to 30 kHz, for Q332 from 30 to 70 kHz, for Q333 from 70 to 130 kHz. 2. Ambient temperature constant ±2°C. 3. Averaged for 1 hour after >80 minutes of continuous operation. 4. FWHM pulse duration measured according to method detailed in Lumentum application note titled “Optical Pulse Width Measurement Techniques for Q-Series Lasers.” 5. Pulse Energy Fluctuations = σ / μ x 100%, σ = standard deviation, μ = average pulse energy. 6. Measured after more than 80 minutes of continuous operation. www.lumentum.com 6

High-Power Q-Switched Diode-Pumped UV and Green Laser Q Series Laser Head Specifications (Continued) Parameter Q201-HD-1000R Q202-HD-1000R Wavelength 532 nm 532 nm Polarization >100:1, vertical >100:1, vertical Spatial mode TEM00 TEM00 M-squared <1.3 <1.3 Waist location (internal, from beam exit) 50±5 cm 50±5 cm Waist diameter, 1/e2 0.35 mm nominal 0.35 mm nominal Beam roundness >85% circular >85% circular Beam divergence, full angle 2.2 mrad 2.2 mrad Pointing drift, over 8 hours, full angle2 <50 μrad <50 μrad Beam position accuracy, unit to unit <1.0 mm from nominal <1.0 mm from nominal Beam pointing accuracy, unit to unit <1.0° from nominal <1.0° from nominal Controller repetition rate Internally triggered1 1 kHz to 250 kHz 1 kHz to 250 kHz Externally triggered2 0 to 250 kHz 0 to 250 kHz Frequency of pulse equalization (FPE)1,2 5 kHz 15 kHz Average output power At 5, 10, 15 kHz ≥12.0, 14.5, 15.0 W - At 15, 20, 30, 40, 50, 60 kHz - >12, 13, 14, 14.5, 14 W Pulse width At 5, 10, 15 kHz 18±10, 29±15, 40±20 ns - At 15, 20, 30, 40, 50, 60 kHz - 55±20, 65±25, 85±35, 110±45, 135±55, 160±65 ns Pulse energy fluctuations4 At 5, 10, 15 kHz <2.0% - At 15, 20, 30, 40, 50, 60 kHz - <2.5% Power drift over 8 hours <±2% <±2% Warm-up time From cold start <20 minutes <20 minutes From standby <10 minutes <10 minutes Operating ambient temperature 15 to 35°C 15 to 35°C Relative humidity, non-condensing 10 to 80% 10 to 80% Weight 14.5 kg 14.5 kg 1. Specification holds over different repetition rate ranges, depending on the laser model, as follows: Q201 from 5-15 kHz, for Q202 from 15 to 60 kHz. 2. Ambient temperature constant ±2°C. 3. Averaged for 1 hour after >80 minutes of continuous operation. 4. FWHM pulse duration measured according to method detailed in Lumentum application note titled “Optical Pulse Width Measurement Techniques for Q-Series Lasers.” 5. Pulse Energy Fluctuations = σ / μ x 100%, σ = standard deviation, μ = average pulse energy. 6. Measured after more than 80 minutes of continuous operation. www.lumentum.com 7

High-Power Q-Switched Diode-Pumped UV and Green Laser Q-PS-1000R Power Supply Parameter Specification Front panel/display Power on/off key Shutter open/closed switch (status LED) Status display (4 line x 20 character vacuum fluorescent) RS232 serial port connector (9-pin D-sub) Rear panel RS232 serial port connector (Identical to front panel) Interlock connector (2-pin, 0.1” spacing) Q switch RF connector (SMA connector) Umbilical connector (multi-pin D-shaped) Chiller communication port (9-pin D-sub) Emission indicator connector (2-pin, 0.1” spacing) External control port (10-pin 3M-style) Slot for optional standard or custom interface board (standard with 3 BNC connectors) Ground pin Fuse holder Power switch Power-cord connector Weight 20.5 lbs (9.3 kg) Umbilical cable length 10 ft. (3 m), 16.4 ft. (5 m), 23.3 ft. (7 m), 33.3 ft. (10 m). Other lengths available on request. Frequency 100 to 240 V AC, 50 – 60 Hz Power <550 W (400 W typical) Input and Ambient Voltage, frequency 100 to 240 V AC, 50 – 60 Hz Power <550 W (400 W typical) Operating ambient temperature 15 to 35°C Relative humidity, non-condensing 10 – 80% Storage temperature -20 to 55°C QA-CH Chiller Parameter Specification Cooling capacity >300 W Refrigerant R134a Coolant Distilled water Reservoir volume <1 gal (3.8 l) Coolant flow rate <0.5 gpm at 14 psi (2 lpm at 1 bar) Weight, reservoir empty <121 lbs (55 kg) Hose length 9.5 ft (2.9 m) or 16 ft (4.9 m). Other lengths on request Chiller control cable length 10 ft (3.0 m) Input and Ambient Voltage, frequency 110/115/208/220VAC ±10% 50 – 60Hz (16A at 100V) Power <1100 W (700 W typical) Operating ambient temperature 15 to 35°C Relative humidity, non-condensing 10 to 80% Storage temperature 5 to 75°C Orientation Upright position only www.lumentum.com 8

High-Power Q-Switched Diode-Pumped UV and Green Laser Ordering Information For more information on this or other products and their availability, please contact your local Lumentum account manager or Lumentum directly at customer.service@lumentum.com. Example for complete system: Q331-HD-1000R (355 nm, 10 to 30 kHz laser head) Q-PS-1000R (power supply) Q-PS-A30R (3 meter flex umbilical cable) QA-CH (standard voltage configuration chiller) QA-CH-A11 (3 m hose set, straight/straight couplings) Laser Head Product Code Description Q331-HD-1000R 355 nm, 5 W class, 10 to 30 kHz Q332-HD-1000R 355 nm, 5 W class, 30 to 70 kHz Q333-HD-1000R 355 nm, 5 W class, 70 to 130 kHz Q301-HD-1000R 355 nm, 10 W class, 10 to 30 kHz Q302-HD-1000R 355 nm, 10 W class, 30 to 70 kHz Q303-HD-1000R 355 nm, 10 W class, 70 to 130 kHz Q304-HD-1000R 355 nm, 11 W class, 40 to 90 kHz Q201-HD-1000R 532 nm, 15 W class, 5 to 15 kHz Q202-HD-1000R 532 nm, 15 W class, 15 to 60 kHz Note: Lumentum Q-Series porfolio covers a wide range of repetition rate from sinlge shot up to 200kHz. Custom models are available upon request. Accessories Product Code Power Supply Description Q-PS-1000R Standard power supply Product Code Umbilical Cable Description Q-PS-A30R 3 meter flex umbilical cable Q-PS-A50R 5 meter flex umbilical cable Q-PS-A70R 7 meter flex umbilical cable Q-PS-A100R 10 meter flex umbilical cable Product Code Chiller Description QA-CH Standard with 110 VAC QA-CH-E European with 220 VAC Product Code Hose Kit Description QA-CH-A11 Pair of 3 m hoses, straight/straight couplings QA-CH-A12 Pair of 5 m hoses, straight/straight couplings QA-CH-A21 Pair of 3 m hoses, right-angle/straight couplings QA-CH-A22 Pair of 5 m hoses, right-angle/straight couplings QA-CH-A31 Pair of 3 m hoses, right-angle/right-angle couplings QA-CH-A32 Pair of 5 m hoses, right-angle/right-angle couplings www.lumentum.com 9

Compliance with Regulatory Requirements These laser sources are generic versions of Lumentum diode-pumped, Q-switched laser systems. The lasers are Class IV lasers as defined by the Federal Register 21 CFR 1040.10 Laser Safety Standard. The Standard requires that certain performance features and laser safety labels be provided on the product. The American National Standards Institute publishes a laser safety standard for users entitled American National Standard for the Safe Use of Lasers (ANSI Z136.1). Lumentum recommends that laser users obtain and follow the procedures described in this ANSI Standard. BEAM OUTPUT BEAM OUTPUT CAUTION CAUTION INVISIBLE LASER RADIATION INVISIBLE LASER RADIATION AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION CLASS 4 LASER PRODUCT, 30 WATTS MAXIMUM @ 532nm CLASS 4 LASER PRODUCT, 25 WATTS MAXIMUM @ 355nm NO USER SERVICEABLE PARTS INSIDE - DO NOT REMOVE ANY COVER NO USER SERVICEABLE PARTS INSIDE - DO NOT REMOVE ANY COVER Warranty Lumentum diode-pumped Q-Series laser systems are warranted to be free of defects in materials and workmanship. Multiple warranty options available. Patent Information The products described in this data sheet are based on Lumentum Intellectual Property which includes more than 1,800 United States and foreign registered patents. These patents are relevant to an extensive set of products and/or technology applications including Lumentum’s laser products and associated technologies. For further information contact the Lumentum Legal Department. North America Toll Free: 844 810 LITE (5483) Outside North America Toll Free: 800 000 LITE (5483) China Toll Free: 400 120 LITE (5483) © 2015 Lumentum Operations LLC Product specifications and descriptions in this document are subject to change without notice. www.lumentum.com qseries-ds-cl-ae 10143146 907 0212