Sampling Inlets for Hiden Mass Spectrometers

Sampling Inlets for Hiden Mass Spectrometers Gas, Vapour and Liquid Sampling Systems Hiden Gas Analysis systems are versatile. Inlet systems are user interchangeable, allowing for transformation of your mass spectrometer to suit new or multiple application requirements.

Gas Sampling Inlets For a wide range of sample flow rates, and sample pressure ranges STANDARD QIC – QUARTZ INERT CAPILLARY LOW PRESSURE STAINLESS STEEL CAPILLARY X Sample pressure range 2 bar to 100 mbar Operates to 200°C X Sample pressure range 250 to 25 mbar X X Capillary length: 1.8 m (standard) X Operates to 200°C X Fast 300 ms sampling response X Capillary length: 0.9 m X Sample consumption rates from 0.8 to 20 ml/min X All stainless steel assembly X Swagelok 1/16” or 1/8” connection X Swagelok 1/16” or 1/8” connection X Corrosion resistant option available X Interchangeable with regular capillary in standard QIC systems X Fast response 0.9 m capillary also available, with sample consumption rates from 1.6 to 20 ml/min X Corrosion resistant option available X Flexible construction ULTRA-LOW FLOW QIC HEATED CAPILLARY INLET HT/HP GAS SAMPLER X For evolved gas studies. For OEMS, online electrochemical MS, where evolved gas flow is limited X Sample pressure range 0.1 to 30 bar X Sample consumption rate of 250 µl/min X Connects to standard QIC Inlet X Operates to 200°C X Heated to 200°C 2 | Sampling Inlets for Hiden Mass Spectrometers Gas, Vapour and Liquid Sampling Systems

VERY LOW PRESSURE SAMPLING INLET MICRO-FLOW INLET X Sample pressure range 10 to 1 mbar X Sampling rate 12 µl/min. 24 µl/min option X Heated to 120°C X Single or multi-capillary inlet option X Capillary length: 0.3 m X 8 – 16 s response. Specially engineered to maintain a X Swagelok 1/8” connection good response X Rigid construction 1 1m meetrtree sseemi-fllexxibiblele h heaetaetde hdo hseo s2e0 02°0C0°C Saample ffrroomm A ALDLD Massss sspeecctrtormometerter 2--Sttage 5m33//hrr SSccrroollll ppuummpp (not-shown) (not-shown) MasMs sapsesc tsrpomecettreor mturebtoe pru mp 70 l/s turbo pump 70 l/s Key - Use PDF reader layer function for additional information Note - Diagram is for illustrative purposes only and is not to any exact scale or proportion Fig.1 Sectional diagram HPR20 System with special inlet for monitoring ALD gases and vapours HPR20_System_for_ALD_Monitoring_with_isolation_valve_01a C ANALYTICAL SGL – HEATED LOW PRESSURE INLET WITH ISOLATION VALVE TRI-VALVE SAMPLING HEAD X For sampling ALD processes with options from 1-5 mbar or 5-50 mbar X Sample pressure range <10-4 mbar to 1000 mbar X Heated to 200°C X Flexible connection to process chamber X Air actuated heated (200°C) isolation ‘ALD’ valve included, X Automatic sample line switching not shown Sampling Inlets for Hiden Mass Spectrometers Gas, Vapour and Liquid Sampling Systems | 3

Multistream Gas Sampling Inlets MSV MULTI-STREAM SELECTOR X 4, 8 or 16-way available X Heating option (160°C) X Corrosion resistant option X Sample flow rate : 50 ml/min X Flow meter option PROTEUS TWIN CAPILLARY INLET X 20, 40, 80-way multi-port valve X Typical application – measuring input and output of X Heated to 120°C reaction vessel X Standard flow > 100 ml/min X Heated to 160°C X Low flow configuration – from 4 ml/min X Fast switching valve between capillaries - less than X High flow configuration – to 10 l/min one second X No crosstalk between streams X Two capillaries of either 0.9 m or 1.8 m 4 | Sampling Inlets for Hiden Mass Spectrometers Gas, Vapour and Liquid Sampling Systems

Gas Sampling Inlets - Thermal Analysis For furnace, glovebox, reactor and evolved gas analysis QIC HT250 INLET X Sample pressure range 2 bar to 100 mbar X Heated to 250°C (HT250) / 450°C (HT450) X HOT-ZONE INLET Sample consumption rates from 0.8 to 20 ml/min X Capillary length: 1.8 m X For sampling from furnaces; interface from furnace to QIC X Swagelok 1/16” or 1/8” connection X Includes heated filter assembly X Interchangeable with standard QIC Inlet X Allows direct sample analysis to 1700°C X Corrosion resistant option available X General design to suit most furnaces X Flexible and robust steel hose QIC GLOVEBOX X Heated to 200°C X Provides low dead volume interface with glovebox TGA-MS QIC HEATED EXTENSION X A range of interfaces are available for TGA-MS evolved gas analysis X Available as upgrade to standard QIC systems X Specially designed to suit designated TGA instrument X Extends length by 2 m (standard extension) or 4 m, 6 m X Most manufacturers and models covered on request Sampling Inlets for Hiden Mass Spectrometers Gas, Vapour and Liquid Sampling Systems | 5

Gas Sampling Inlets for Analysis of dissolved gases in liquids DIRECT MEMBRANE INLET PROBE CUVETTE X For immersion and/or insertion in liquid or sludge samples, X Cuvette style sample cell for biofuel research soil core sampling for example X Removable cover for light sensitive research ENZYME KINETICS PROBE DENITRIFICATION PROBE X Probe sampler for the study of the chemical reactions that X Flow through probe, low flow design for denitrification studies are catalysed by enzymes X Allows for water vapour removal using liquid nitrogen cold trap X All glass probe construction 6 | Sampling Inlets for Hiden Mass Spectrometers Gas, Vapour and Liquid Sampling Systems

LARGE CIRCULAR MEMBRANE CELL DEMS DIRECT INLET X Flow through dissolved species probe inlet, with liquid flow X Probe sampler for in situ measurement of electrochemical connections products X Larger surface area for fast and sensitive measurements X Can be positioned at the electrodes of Redoxme™ cells X Integrated thermocouple for on-line sample temperature and/or users’ own cells measurement DEMS X A combined mass spectrometry inlet and electrochemical cell for real time differential mass resolved determination of gaseous or volatile electrochemical reactants, reaction intermediates and products while scanning electrochemical parameters FLOW-THROUGH DISSOLVED SPECIES PROBE X Allows static or dynamic electrolyte flow X For analysis of sample with continuous flow, extracted sea X Thin layer and dual layer cells or estuary water for example Sampling Inlets for Hiden Mass Spectrometers Gas, Vapour and Liquid Sampling Systems | 7

Hiden’s quadrupole mass spectrometer systems address a broad application range in: GAS ANALYSIS dynamic measurement of reaction gas streams catalysis and thermal analysis molecular beam studies dissolved species probes Hiden Analytical Ltd. fermentation, environmental 420 Europa Boulevard and ecological studies Warrington WA5 7UN England T +44 [0] 1925 445 225 F +44 [0] 1925 416 518 SURFACE ANALYSIS E info@hiden.co.uk W www.HidenAnalytical.com UHV TPD SIMS - Quadrupole and ToF end point detection in ion beam etch elemental imaging – 3D mapping Sales Offices: We have sales offices situated around the globe. Visit our website for further PLASMA DIAGNOSTICS information. plasma source characterisation etch and deposition process reaction kinetic studies Hiden systems are supplied analysis of neutral and radical species with at least one sampling inlet, systems are user upgradeable and can accommodate a wide range VACUUM ANALYSIS of inlet systems. To confirm compatibility for specific partial pressure measurement and control of process gases inlet systems for operation reactive sputter process control with your system please vacuum diagnostics contact Hiden Analytical or vacuum coating process monitoring your local representative. TDS 169/3